Abstract

In this paper, a new approach for capacitance measurement for electrical capacitance tomography (ECT) sensors is proposed. The method is based on the digital processing of the time-domain voltage measurements at the sensor electrodes. Furthermore, a robust capacitance estimation algorithm is developed to convert the measured voltage time-series to inter-electrode capacitances. The proposed measurement technique simplifies the electronic design of the ECT sensor and is suitable for use in applications requiring a compact device with a fast scan time. The accuracy and sensitivity of the method are investigated numerically and experimentally using a prototype sensor. In particular, the sensitivity of the estimated capacitance to measurement noise levels is analyzed in detail. Additionally, an analysis of the parameters that affect the accuracy of estimated capacitances is carried out from which we are able to demonstrate that the method is immune to effects such as stray capacitances between the electrodes and the ground. A prototype sensor with an open curved geometry on a millimeter scale is used to test the method empirically. Experimental results obtained for measurements with mineral oil and water are shown and compared against capacitances obtained using a physics-based forward model of the sensor. The inter-electrode capacitances in the range of tens of femtofarads to a few picofarads are estimated and a close match with the forward model results is obtained.

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