Can proximity x-ray lithography print 35 nm features? Yes

Abstract

We report on the results of our effort to extend proximity x-ray lithography (PXL) to 35 nm using a harder energy spectrum, and choosing the appropriate materials for the mask and the resist to match the transmission and absorption at higher energies. Previous studies [M. Kahn et al., J. Vac. Sci. Technol. B 17, 3426 (1999); T. Kitayama, J. Vac. Sci. Technol. B 18, 2950 (2000)] have shown that PXL is capable of printing 50 nm features, and in this study, we extend that work to show that PXL can indeed be used for 35 nm generation. We investigate the use of higher energy radiation, in conjunction with novel resist materials, to deliver the 35 nm node and provide a set of requirements to achieve that goal.