Abstract
Areal optical surface topography measurement is an emerging technology for industrial quality control. However, neither calibration procedures nor the utilization of material measures are standardized. State of the art is the calibration of a set of metrological characteristics with multiple calibration samples (material measures). Here, we propose a new calibration sample (artefact) capable of providing the entire set of relevant metrological characteristics within only one single sample. Our calibration artefact features multiple material measures and is manufactured with two-photon laser lithography (direct laser writing, DLW). This enables a holistic calibration of areal topography measuring instruments with only one series of measurements and without changing the sample.
Highlights
IntroductionAreal surface topography measurement has emerged (see e.g [1,2,3]. for a historical overview)
In the past decades, areal surface topography measurement has emerged
The ISO 25178-600 defines currently the following basic metrological properties for a surface topography measurement [7]: (i) the amplification coefficient of the three axes describes the slope of the response function of the axis. (ii) The linearity deviation of an axis is the maximum local difference between the straight-line fit of the response function and the measured response function itself. (iii) The flatness deviation, which is the maximum deviation between an ideal plane and its measured topography. (iv) The measurement noise and (v) the topographic spatial resolution are characteristics of the height axis. (vi) The x-y mapping deviation describes the local deviations of the lateral axes including their perpendicularity. (vii) The topography fidelity characterizes whether the measuring instrument adequately transfers topographic features
Summary
Areal surface topography measurement has emerged (see e.g [1,2,3]. for a historical overview). For the calibration of areal surface topography measuring instruments, the ISO 25178-6xx series (see e.g [6].) defines the metrological characteristics: part 600 in a general way and the other parts for specific measuring principles. As the metrological characteristics can be determined by performing measurement tasks, they are subject to the calibration of topography measuring instruments, which is described in the ISO 25178-7xx series (see e.g [8].). The practical specification of topography measuring instruments based on the metrological characteristics is subject to research work and aims at achieving acceptance of the new definitions within the industrial application [15,16]. We propose an approach which allows the calibration of arbitrary metrological characteristics with only one sample featuring several material measures. The general suitability of DLW for the manufacturing of calibration geometries has already been proven in previous studies [18,19,20]
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