Abstract
AbstractA secondary ion mass spectrometer equipped with a low‐resolution argon ion source and a small quadrupole ion mass analyser was calibrated for moderate to high concentrations of hydrogen and deuterium in graphite. The polished graphite samples were implanted with hydrogen isotope ions of 1 or 2 KeV energy. The depth profiles of the implanted hydrogen were determined by means of elastic recoil detection (ERD) and compared with those obtained by SIMS. Linear correlations were found between the peak D+/C+ or CH+/C+ ratio and the maximum D or H concentration determined by ERD, as well as between the integral of the SIMS profile curves and the total quantity of hydrogen isotope.
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