Abstract

In recent years, the increase in the number of smartphones led to a remarkable demand for low-cost microphones. This was met by the rapid development of MEMS (MicroElectroMechanical Systems) microphones, whose technology is becoming a promising perspective for future noise measurements based on new acoustic sensor networks. Nevertheless, current Standards do not provide proper calibration and test procedures for these microphones. In this work, calibration standard procedures have been adapted to characterize condenser MEMS microphones by comparison technique with laboratory standard microphones. Microphone parameters (sensitivity, frequency response, linearity, directivity, stability, and dynamic range) and changes of sensitivity with temperature (from -10 °C to + 50 °C) and humidity (from 25% to 90%) have been evaluated in a hemi-anechoic room and in an environmental chamber, respectively. These procedures open up the possibility to provide a robust and metrological characterization of MEMS microphones for noise measurements.

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