Abstract
In recent years, there has been rapid growth in demand for precision grade micro-electromechanical system microphones (MEMSMs). While new applications are increasingly demanding in terms of MEMSM performance, research and development of the technology is thus far keeping pace. To calibrate all these new MEMSMs, a reliable and cost-efficient method for bulk calibration of MEMSMs is urgently required. This paper describes a pilot version of such a method, carried out at the United Kingdom's National Physical Laboratory. The method was intended for use by MEMSM manufacturers themselves for bulk calibration. It may also be usable by manufacturers of devices that incorporate multiple MEMSMs for bulk calibration of these MEMSMs, provided that they are detachable from the devices' circuit-boards. The uncertainty of the method has been compared to that of the coupler comparison calibration which is a technique for acoustic pressure calibration of precision microphones. It is concluded that the pilot method is promising as the basis of a method for the bulk calibration of precision MEMSMs.
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