Calculations of the sputtering energy reflection coefficient for hydrogen plasma ion bombardment on carbon surfaces

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Abstract Monte Carlo calculations have been carried out for the sputtering energy reflection coefficient (Y E ) of plasma ions incident on a carbon surface. The calculations incorporate a simulation of the velocity distribution of plasma ions incident on a surface with a floating potential. The average energy of an ion can increase by more than a factor of three as a result of this potential and the effect on Y E can be significant. An analytic form for Y E is constructed expressed in terms of the ion plasma temperature and the surface floating potential. The new model provides a fast and accurate means to calcualte Y E .