Abstract

Abstract Axially symmetric electrostatic multitubular core-lenses are especially suited for three-dimensional imaging by electron-optical tilting. Objective lenses of this type are calculated numerically and a lens system with a dispersion-free cone edge focus is found by optimization. For 50 keV electrons and a focal length of 1 cm, the coefficient of the third-order aperture aberration and the coefficient of the axial chromatic aberration of the first order are about 20 cm referred to the object plane. This yields a theoretical point resolution of 1.4 nm. Rotationally symmetric electrostatic multitubular core-lenses can also be used as high performance spectrometers for electrons or ions.

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