Abstract
AbstractA CAD model for an air‐gap‐type TFBAR is presented. Aluminum nitride is used as the piezoelectric material with platinum electrodes. To verify the model, simulated and measured results are compared for various top electrode thicknesses, and the agreement is within 0.5% for the parallel resonance frequency. © 2002 Wiley Periodicals, Inc. Microwave Opt Technol Lett 34: 384–385, 2002; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.10469
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