Bulk silicon holding structures for mounting of optical fibers in v-grooves

Abstract

A set of micromachined structures for holding optical fibers in anisotropically etched v-grooves has been produced. The structures are made of bulk silicon and formed in the same etch step as the aligning v-grooves, using the photovoltaic electrochemical etch-stop technique (PHET). It is a selective etch method where n-type silicon etches and p-type are passivated by combining an illuminated pn-junction and an electrochemical cell using KOH as electrolyte. The structures were produced in a variety of shapes, based on cantilever beams and doubly clamped bridges. The structures substantially facilitated the mounting of the fibers into the v-grooves. Certain structures could even push the fibers down into position in the grooves.