Abstract
Bulk multi-walled carbon nanotubes (MWNT) were successfully and repeatably manipulated by AC electrophoresis to form resistive elements between Au microelectrodes and were demonstrated to potentially serve as novel temperature and anemometry sensors. We have measured the temperature coefficient of resistance (TCR) of these MWNT bundles and also integrated them into hot-film anemometry constant current configuration for dynamic characterization. It was discovered that the resulting device could be operated in /spl mu/W range, which is three orders of magnitude lower than conventional MEMS polysilicon based shear stress sensors. For example, to achieve a resistance overheat ratio in the magnitude of 0.1, only 10 /spl mu/A of current is needed to heat these MWNT bundle elements compare to mA current range for polysilicon-based sensors. Moreover, the device exhibited very fast frequency response (>100 kHz) in constant current mode, which is higher than its reported MEMS polysilicon counterparts in this mode of operation. Our current processing technology is scalable in producing these MWNT sensing elements ranging from 5 /spl mu/m to 15 /spl mu/m in length.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
