Abstract
We obtained as-grown Bi2Sr2Cu1Ox (2201) superconducting thin films using a MBE system consisting of two electron guns and two effusion cells. The samples were obtained evaporating simultaneously the single elements on heated substrates and oxygenating them during the growth by using an atomic oxygen plasma source (OPS). Sticking coefficients of each element were determined as a function of the substrate temperature and oxygen partial pressure. In order to monitor the surface structure, Reflection High Energy Electron Diffraction (RHEED) analysis was employed during the deposition process. The chemical composition was obtained by Energy Dispersion Spectroscopy (EDS) while the final structure was studied by X-ray diffraction patterns.
Published Version
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