Abstract
A zero-power wakeup scheme for energy-efficient sensor applications is presented in this study based on a piezoelectric MEMS energy harvester featuring wafer-level-integrated micromagnets. The proposed setup overcomes a hybrid assembly of magnets on a chip-level, a major drawback of similar existing solutions. The wakeup device can be excited at low frequencies by frequency up-conversion, both in mechanical contact and contactless methods due to magnetic force coupling, allowing various application scenarios. In a discrete circuit, a wakeup within 30–50 ms is realized in frequency up-conversion at excitation frequencies < 50 Hz. A power loss in the off state of 0.1 nW renders the scheme virtually lossless. The potential extension of battery lifetime compared to cyclical wakeup schemes is discussed for a typical wireless sensor node configuration.
Highlights
MEMS Device for Energy-EfficientToday, billions of sensors form the interface between the IoT and its physical environment [1]
Since the power consumption in standby between measurement events can noticeably shorten the battery life of a sensor node, a major direction of development aims at the realization of zero-power standby solutions to extend battery lifetime [6]
The facilitated MEMS devices to transduce the mechanical or magnetically induced The facilitated MEMS devices to transduce the mechanical or magnetically induced shock is based on a trapezoidal cantilever structure (29 μm poly-Si) coated with a piezoeshock is based on a trapezoidal cantilever structure (29 μm poly-Si) coated with a piezoelectric aluminum nitride (AlN)
Summary
Billions of sensors form the interface between the IoT and its physical environment [1]. A common zero-power standby scheme utilizes a transistor switch to cut off the power supply of a device when it does not needed to operate [6] In this case, a wakeup unit is required which provides a voltage signal at the transistor gate at specific wakeup events. Piezoelectric MEMS energy harvesters target mechanical energy sources They offer a high level of miniaturization and a high power density [12] which. They offer a high level of miniaturization and a high power density [12] which can provide short wakeup times. MEMS technology is potentially suitable for the cost-efficient fabrication of miniaturized and integrated wakeup units. Onfound this MEMS device, a contactless low-frequency zero-power standby is demonBased on this. Level-fabricated MEMS device with integrated permanent magnets used for zero-power wakeup
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