Broadband achromatic thermal metalens with a wide field of view based on wafer-level monolithic processes

Abstract

We present a monolithic metalens free of chromatic aberration over the 8–12 μm wavelength range for thermal imaging. The metalens consists of nano-donut-pillars for dispersion engineering. The proposed metalens design is based on a telecentric optical system, which effectively eliminates off-focus distortion and aberration, enhancing overall imaging quality. Offering a 90° field of view, the metalens ensures uniform focal spot sizes within a 45° field angle across the working wavelength. This enables the capture of high-quality thermal images with sharp images and minimal distortion. With a diameter of 5.75 mm, the metalens is suitable for integration into commercial thermal imaging cameras. The nano-donut-pillar structure of the metalens allows for relatively straightforward mass production, involving i-line stepper lithography and silicon deep etching processes.