Bottom-up Process to Fabricate Periodic Arrays of β-FeSi2 Nanopillars for Photonic Applications

Abstract

We propose a novel self-assembly process to fabricate periodic arrays of β-FeSi2 nanopillars for photonic applications. Self-assembled monolayers of polystyrene nanospheres (PSNSs) are coated with SiO2 by oblique evaporation at a deposition angle of 70{degree sign}. After the PSNSs are removed by annealing in air at 650 {degree sign}C, periodic arrays of SiO2 nanospherical crowns (NSCs) remain. On the NSC template, Si and Fe are deposited alternatively at a deposition angle of 80{degree sign} and a substrate temperature of 470 {degree sign}C. Due to the strong shadowing effect, non-close-packed nanopillar arrays of β-FeSi2 are successfully fabricated. Periodic arrays of β-FeSi2 are useful to manipulate thermal and/or solar radiation.