Fabrication of periodic arrays of silicide nanopillars by using self‐assembled polystyrene nanosphere template and oblique deposition technique

Abstract

AbstractWe propose a novel self‐assembly process to fabricate periodic arrays of β‐FeSi2 nanopillars for photonic applications. Self‐assembled monolayers of polystyrene nanospheres (PSNSs) are coated with SiO2 by oblique evaporation at a deposition angle of 70°. After the PSNSs are removed by annealing in air at 650 °C, periodic arrays of SiO2 nanospherical crowns (NSCs) remain. On the NSC template, Si and Fe are deposited alternatively at a deposition angle of 80° and a substrate temperature of 470 °C. Due to the strong shadowing effect, non‐close‐packed nanopillar arrays of β‐FeSi2 are successfully fabricated. Periodic arrays of β‐FeSi2 are useful to manipulate thermal and/or solar radiation. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)