Abstract
The formation of a boromic surface layer on stainless steel by pulsed XeCl excimer laser irradiation in pure BCl 3 and in a mixture of BCl 2 and H 2 is reported. The laser-treated samples were examined by scanning electron microscopy and analyzed by Auger electron spectroscopy and X-ray photoelectron spectroscopy techniques. The compositional analysis of the layer indicates that boron has been doped into the surface in pure BCl 3 gas, while in the mixture of gases, the doping is not obvious, which is contrary to conventional methods. The measured highest concentration of B in the formed layer exceeds 30 at %.
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