Boosting the two-dimensional electron gas density of Al0.20Ga0.80N/GaN heterostructures by regrowth of an epitaxial Sc0.18Al0.82N layer

Abstract

Sc-alloyed AlN epilayers were grown on commercial GaN/sapphire templates by molecular beam epitaxy (MBE) to validate the Sc composition of 18% and in-plane lattice matching with GaN. As-grown Sc0.18Al0.82N/GaN heterostructure exhibits a two-dimensional electron gas (2DEG) density of 3.58 × 1013 (2.96 × 1013) cm−2 and a mobility of 241 (295) cm2⋅V−1⋅s−1 at 300 (77) K, demonstrating the feasibility of employing its high spontaneous polarization toward high 2DEG density and highlighting detrimental impurity scattering due to the regrowth interface. Implementation of AlN impurity blocking layers boosts 2DEG mobility to 1290 (8730) cm2 V−1⋅s−1at 300 (77) K. In addition, we have engineered a surface-treatment strategy to selectively decompose the 2.5-nm-thick GaN cap layer of commercial GaN(2.5 nm)/Al0.20Ga0.80N(22 nm)/GaN heterostructure epi-wafers at high temperature prior to MBE regrowth of Sc0.18Al0.82N to eliminate impurity incorporation at the regrowth interface. Regrowth of a Sc0.18Al0.82N layer on the pristine Al0.20Ga0.80N surface increases 2DEG density from 7.89 × 1012 to 9.57 × 1012 cm−2, together with a slight reduction in mobility from 2160 to 1970 cm2⋅V−1⋅s−1 at 300 K, reducing the sheet resistance by 10%. Our calculation implies that it is practical to boost 2DEG density to over 2.0 × 1013 cm−2 by thinning Al0.20Ga0.80N down to 4 nm.