Abstract
We studied the second order optical nonlinearity of aluminum nitride films grown by sputtering onto silicon substrates. The crystalline properties of the films were investigated by x-ray diffraction measurements. Preliminary linear optical characterization of the films was carried out by spectrophotometric optical reflectance measurements at different incidence angles; thus the dispersion laws for both ordinary and extraordinary refractive indices were retrieved. Finally, second harmonic generation measurements in reflection mode were performed at a fixed angle from a fundamental beam provided by a picosecond Ti:sapphire laser system at λ=800nm. In the experiments a high blue light conversion efficiency was found for samples 1.5 and 2μm thick, and the second order nonlinear coefficient d33=11±1pm∕V was found.
Published Version
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