Abstract
The static mechanical properties of a bistable electromechanical drive with arcuate suspension is investigated. The behaviour of an arcuate suspension and the influence of the beam thickness modulation on the stability of both stationary states is studied experimentally and theoretically. The influence of the beam shape modulation on its potential energy was determined with finite element analysis. The simulation results were verified experimentally. In the study, the optimal modulation configuration is determined. With help of this modification the sustainability of both mechanically stable states is significantly improved.
Highlights
The major element of micro-electro-mechanical systems (MEMS) is an elastic microstructure in the form of spring, a beam or a membrane
The influence of the beam shape modulation on its potential energy was determined with finite element analysis
The work is focused on arch-shaped suspensions, which profile is determined by the mode of buckling. The nonlinearity of such suspensions causes a sharp increase in the axial load of the suspension under an applied lateral load of the suspension [1]
Summary
The major element of micro-electro-mechanical systems (MEMS) is an elastic microstructure in the form of spring, a beam or a membrane. The work is focused on arch-shaped suspensions, which profile is determined by the mode of buckling. The nonlinearity of such suspensions causes a sharp increase in the axial load of the suspension under an applied lateral load of the suspension [1]. This structure has two minimum of the potential energy i.e. the mechanical structure has two stable states. 2. Method description The profile (w(x)) of an arch beam of thickness t is determined by the first form of buckling (Figure 1a). The initial shape of the actuated beam are directly controlled through the lithography and DRIE
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