Abstract
A bio-inspired dome-shape SiO2/SiN membrane-in-recess is fabricated by two subsequent wet-etching steps, continued with membrane material thin film deposition, and backside deep reactive ion etching for releasing the membrane. White light interferometer (WLI) confirmed the shape of the membrane. The middle apex of the membrane has 12 μm positive indentation from the edge, which is recessed 2-4 μm. The strain-amplifying mechanical characteristics are modeled by finite element. For verification, the structure is attached onto another plate structure being axially pushed and pulled. The membrane is vertically displaced ∼200 nm under 4 μ-strain applied strain, displaying two orders of amplification.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
