Abstract
The directed assembly of binary blends of diblock copolymers on chemically nanopatterned substrates was investigated as a means to pattern features of controlled dimensions at the nanoscale. The lamella-forming blends assembled without defects and in registration with underlying chemical surface patterns that had periods LS that were commensurate with the bulk lamellar period of the blends LB. LB was tuned between the bulk lamellar periods of the block copolymers LO1 and LO2.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
