Abstract

We report oscillations in Sb2 reactivity with the growth surface during layer-by-layer deposition of AlSb (001) by molecular beam epitaxy. Real-time measurements of the Sb desorption rate using line-of-sight mass spectrometry, in parallel with reflection high-energy electron diffraction specular beam intensity measurements, suggest that this behavior results from the periodic variation of the surface step density as these steps act as preferential adsorption sites for antimony. This is further supported by computer simulations that examine the surface step density as a function of bilayer coverage.

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