Bias-voltage dependence of structure in Mn–Ni–O/mica flexible films for high precise temperature sensing up to 600 °C

Abstract

Mechanically deformable flexible temperature sensors are being used to fabricate next-generation smart electronics, but improving their high-temperature application range is still a major challenge. In this work, in pursuit of excellent performance, a series of Mn–Ni–O ultrathin flexible thermal thin films with dual-phase structure were successfully prepared by magnetron sputtering using the bias voltage adjustment method. The interactions of grain density, ionic valence and phase structure on the performance of high-temperature NTC are emphasized. By overcoming the significant drawbacks of the flexible thermal films such as poor stability and narrow temperature range under high temperature conditions, excellent thermal performance with a wide temperature range from 200 °C to 600 °C and a resistance drift rate as low as 1.5 % has been achieved. This opens up innovative prospects for the design and application of flexible high-temperature thermal materials.