Abstract
Good transparent conducting indium tin oxide films with good adherence were deposited on water-cooled polypropylene adipate substrate using bias r.f. magnetron sputtering. The films with resistivity as low as 6.3×10 −4 Ω cm and transmittance over 80% have been obtained by adjusting the bias voltage. It was observed that the structural, electrical and optical properties of the films depend on the bias voltage applied to substrate table.
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