Abstract
Bi-layer sensors have been used to detect a range of parameters such as displacement, temperature, curvature and stress. This is possible by accurately measuring low voltage signals (∼10–4 V) associated with inductance changes of bi-layer thin-film sensors under bending stress. The sensor sensitivity is governed by the induced stress on the bi-layer and the coil parameters. These parameters are the coil's physical dimensions, number of turns, the cross sectional area and the properties of the magnetic material. Taking in consideration the modulating circuit component values and the desired frequency range, the combination of coil parameters and excitation current were optimized to provide the largest change of inductance and hence the largest change of relative permeability.
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