Abstract

SummaryThe pumping speed of ion getter pumps – Comparison of measurement methodsPumping speed measurements of sputtering ion pumps are typically carried out according to DIN 28429 or ISO/DIS 3556‐1.2.In this article, we take a look at the differences between these two measurement methods. Based on experimental data, the impact of pressure holding times on reproducibility and absolute values of the extracted pumping speeds are discussed.Pumping speed measurements according to the now withdrawn ISO/DIN 3556‐1.2 may yield up to 30 % higher values than values based on the validated DIN28429. The definition of sampling times according to DIN 28429 enables reproducible measurements.

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