Abstract
SummaryThe pumping speed of ion getter pumps – Comparison of measurement methodsPumping speed measurements of sputtering ion pumps are typically carried out according to DIN 28429 or ISO/DIS 3556‐1.2.In this article, we take a look at the differences between these two measurement methods. Based on experimental data, the impact of pressure holding times on reproducibility and absolute values of the extracted pumping speeds are discussed.Pumping speed measurements according to the now withdrawn ISO/DIN 3556‐1.2 may yield up to 30 % higher values than values based on the validated DIN28429. The definition of sampling times according to DIN 28429 enables reproducible measurements.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
