Abstract

A test dome for pumping speed measurements on sputter ion pumps is described. Results of Monte Carlo computations are presented which give for this dome the correlation between the intrinsic pumping speed and the pressures as measured at the dome. In particular, the influence of gauge position on speed measurement has been investigated as well as the influence of the geometry of the pump under test. The pump geometry affects the angular distribution of the molecules re-entering the dome from the pump side. It is shown that this influence is in most cases negligible.

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