Abstract
TiNx and TiCy coatings were deposited by physical vapour deposition (PVD) under different process conditions. The coatings were studied by particle induced X-Ray emission (PIXE) and Rutherford backscattering spectroscopy (RBS) with a low energy (300 keV) ion beam. The layer thicknesses from the PIXE and the RBS analyses are in good agreement. Correlations were found between the chemical composition of the TiNx and TiCy layers and the partial pressures of N2 and C2H2 (C3H8), respectively.
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