Abstract
Abstract. In this work we compare on-wafer calibration standards fabricated in membrane technology with standards built in conventional thin-film technology. We perform this comparison by investigating the propagation of uncertainties in the geometry and material properties to the broadband electrical properties of the standards. For coplanar waveguides used as line standards the analysis based on Monte Carlo simulations demonstrates an up to tenfold reduction in uncertainty depending on the electromagnetic waveguide property we look at.
Highlights
Traceability for scattering parameter measurements back to SI units has long been possible for coaxial waveguides
For coplanar waveguides used as line standards the analysis based on Monte Carlo simulations demonstrates an up to tenfold reduction in uncertainty depending on the electromagnetic waveguide property we look at
We presented a closer examination of the uncertainties in the electrical properties of a coplanar waveguide (CPW) fabricated in membrane technology compared to CPWs built on several hundred μm thick dielectric substrates
Summary
Traceability for scattering parameter measurements back to SI units has long been possible for coaxial waveguides. Uncertainties in the complex permittivity of the dielectric substrate can have a substantial effect on the propagation characteristics of the coplanar waveguide (CPW) as recent studys (Arz et al, 2008a) have shown.
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