Abstract
Behavior of the ion sheath near an aperture of ion source is investigated via a nonlinear Poisson equation for an electric potential function in a cylindrical coordinate system. On the assumptions of free electrons with Maxwellian distribution and ion flow against the aperture, the sheath condition and the condition under which the plasma surface is concave are derived. These conditions are shown to depend on the aperture radius, potential of electrode U, electron temperature kT/sub e/ and initial ion velocity. The ion current through the aperture with maximum radius is found to increase significantly when U is greater than or equal to 20kT/sub e/. Behavior of the potential distribution and plasma boundary under various situations are also demonstrated by means of numerical calculations. (auth)
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