Abstract
Beam-induced annealing of defects in silicon after light-ion implantation at 30 K.
Published Version
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https://doi.org/10.1103/physrevb.35.2732
Copy DOIJournal: Physical review. B, Condensed matter | Publication Date: Feb 15, 1987 |
Citations: 17 |
Beam-induced annealing of defects in silicon after light-ion implantation at 30 K.
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