BaTiO 3 film optical-waveguide prepared by pulsed laser deposition

Abstract

High quality BaTiO 3 optical-waveguide thin films on MgO(1 0 0) substrate were fabricated successfully by using pulsed laser deposition technique. The properties of the samples were characterized by using Rutherford backscattering (RBS), X-ray diffraction, atomic force microscopy and prism coupling method. The RBS shows no obvious evidence for interdiffusion between the film and the substrate. The thickness of the film and the Ba/Ti ratio were calculated based on RBS to be 881 nm and 1.004, respectively. X-ray diffraction results show that the as-deposited BaTiO 3 film is basically oriented polycrystalline, and strong ( l 0 0) peaks were revealed. The root mean square (rms) roughness of the film was evaluated to be 0.796 nm, this is only 0.1% of the film thickness. The bright TE ( m=0,1,2,3) and TM ( m=0,1,2,3) modes in the BaTiO 3 film optical waveguide were observed.