Batch processing of nanometer-scale electrical circuitry based on in-situ grown single-walled carbon nanotubes

Abstract

We present a fabrication method for a nanometer-scale conducting network made of self-assembled single-walled carbon nanotubes. The electrical connection of the suspended nanotubes to the metallic contacts is obtained during the nanotube synthesis itself, which involves the hot-filament CVD technique. We directly characterize, without any further processing, the electronic transport properties of samples with different pad geometries. At room temperature, all tested samples show ohmic behavior in the kΩ range, for both two-probe and four-probe geometries. At low temperature, non-linear transport is observed and a large discrepancy of resistance arises between two-probe and four-probe geometries, suggesting the dominant influence of the contact resistance.