Barium titanate glass–ceramic thin films for integrated high-dielectric media

Abstract

BaTiB glass–ceramic thin films with a substantial number of perovskite barium titanate (BaTiO 3) grains were deposited on Pt-coated silicon substrates by sol–gel processing. The prepared films exhibited a mixed structure of glass phase and BaTiO 3 grains tens of nanometers in diameter. A self-mending phenomenon for microcracks was observed in the films. Electrical characterisation results showed a high dielectric constant, low leakage current and dielectric loss. The potential application of the BaTiO 3 glass–ceramic thin films for integrated high-dielectric media is discussed.