Abstract

We show that electronic states at extended defects in semiconductors can be classified as bandlike or localized using deep-level transient spectroscopy (DLTS), when electron equilibration at the defect is taken into account. We compare computer simulations of DLTS with data for 60\ifmmode^\circ\else\textdegree\fi{} dislocations and for ${\mathrm{NiSi}}_{2}$ platelets in silicon and find narrow point defect clouds in the first and a two-dimensional metal or a metal ring in the second example.

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