Abstract
Conducting perovskite oxide, (Ba,Sr)RuO 3 (BSR), which has many advantages for (Ba,Sr)TiO 3 (BST) due to their similarity in crystal structure, lattice constant and chemical composition, was prepared on n-type Si (100) by liquid delivery metalorganic chemical vapor deposition (LDMOCVD). The deposition characteristics of BSR were controlled by gas-phase masstransfer in these experiments. The BSR films deposited at 500°C and oxygen flow rate of 100 sccm (standard cc/min) showed a average roughness of 22 Å and resistivity of 810 w z -cm. The resistivity of BSR films for variation of oxygen flow rate showed a close relationship with the roughness of films.
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