B32 長尺配管を有する空気圧式アクティブ除振装置の制御に関する研究(OS3-1 免震・除振装置)

Abstract

Recently, influence of micro vibration on precision machines is increasing in many high technology fields such as semiconductor manufacturing. Therefore, active vibration isolation device equipped with air actuators and sensors using active control technology comes into use for the micro vibration control field. In previous study, active vibration isolation device achieved good vibration performance. But now, there is a suggestion that the active vibration isolation device must be able to isolate a machine which generates a very powerful magnetic field. Previously, the servo valves which provide actuators with air are set up on actuators directly, but now servo valves need to be separated from actuators by using long pipes to avoid the effect of magnetic field. Using long pipes changes the dynamics of the device. In this study, controller is designed by model matching method, and isolation performance is improved.