Axially slow-variation microbubble resonators fabricated by an improved arc discharge method for strain sensing applications

Abstract

In this paper, we proposed an axially slow-variation microbubble resonator fabricated by an improved arc discharge method and applied to axial strain sensing. The prepared resonators are characterized by ultra-thin wall thickness and axial slow-variation. The wall thickness was experimentally measured to reach 938 nm and maintain a quality factor of an optical mode as large as 7.36 ×107. The main factors affecting the strain sensitivity of the microbubble resonators are investigated theoretically and experimentally. Experimentally, the maximum sensitivity measured was 13.08pm/µε, which is three times higher than the microbubble resonators without this method. The device is simple to prepare and possesses ultra-thin wall thickness. It is promising for applications in high-precision sensing, such as single molecule and biological sensing.