Abstract
We propose 2D single-shot comb interferometry with the capability of zooming along the axial axis for profilometry and tomography. A spatial phase modulator (SPM) based a diffraction grating is utilized to realize the zooming operation with a fine scale in the proposed system. The measurable range of the fine scale can be varied from 200μm to 1.2 mm by controlling the diffraction orders of the SPM, allowing a magnification tool for surface profilometry. An optical-frequency comb-interferometry-based Fabry–Perot etalon is used to extend the measurement range of proposed system with a coarse scale up to 10.8 mm. In both the coarse and fine scales, the tomography resolution is maintained at approximately 2.5μm.
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