Abstract
In this paper, a passive mechanism is proposed for regulating the axial forces due to thermal stresses induced in MEMS resonant sensors. It is shown that by using this mechanism, one can control the axial force or thermal stresses to be compressive or tensile, or zero. An analytical model and a finite element model are developed for this study. It is shown that the analytical model is a powerful tool to predict the overall response and/or optimize the design, while the finite element model can be used for fine tuning and obtaining more accurate results.
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