Abstract
The thin film thickness system is analyzed in detail,and the film thickness measuring system is discussed on the whole.The key parts of hardware circuit is studied in film thickness instrument of thickness measuring system,and the software flow of the film thickness instrument is designed discretely.The AVR microcontroller as the core processor for data acquisition and processing,the on-line optical thin film thickness measurement and monitoring system is designed and manufactured.By contrast experiment with the actual film thickness,it is verified that the thin film measuring system has high precision,high stability and high reliability.It can be applied to practical industrial production.
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