Abstract
We have developed an inexpensive computer controlled microwave oscillator system that enables quick and automatic measurements of the complex permittivity with a specific split post dielectric resonator (SPDR). It is based on a phase-locked loop Microwave Voltage Controlled Oscillator intended for the Q-factor and the resonance frequency measurements of SPDR. Multipoint resonance curve fitting procedure allows accurate Q-factor determination. The only external information that is necessary for the complex permittivity determination of a dielectric substrate or a ferroelectric film is the thickness of the sample under test. We compare the complex permittivity measurement results on few dielectric samples employing Vector Network Analyser and our measurements set-up. We also present measurement results of the sheet resistance and resistivity of epitaxial GaN films deposited on sapphire substrates.
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