Abstract

In view of the characteristics of non-silicon flat micro parts in MEMS devices, such as small, light and thin, a vacuum adsorption microassembly system based on microvision was established. Through the research on the key assembly technologies of micro-gripper operation, moving control and micro vision positioning, a general scheme of automatic assembly for flat micro parts is put forward, which is based on the combination of teaching playback and microscopic visual feedback. Furthermore, some key technologies are especially studied, such as teaching playback control method, target part recognition, position compensation and attitude adjustment, and an automatic assembly program is developed by using VC++ platform. The experimental results show that automatic assembly can be realized by using the combinational control mode of visual servo and teaching playback, and it has higher precision and efficiency, and it also has realistic significance to automatic assemble application.

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