Abstract
We have developed automatic positioning and waveform acquisition techniques for measurement with an electron beam tester (EBT). Automatic positioning is difficult due to stage movement, magnification, and wiring width error in a CAD-linked tester. To correct these errors, we developed an SEM image-to-layout matching technique. A waveform is obtained by averaging repeatedly acquired waveforms. However, it is impossible to obtain the waveform with the same resolution, because a waveform is acquired using specified averaging in a conventional EBT. We developed the technique that how to monitor the voltage resolution simultaneously in the acquisition sequence. This technique makes it possible to stop acquisition at specified voltage resolution for quick, correct measurement. Using these techniques, we were able to automatically measure the waveforms specified in a CAD layout at about 90 s/wiring.
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