Abstract
An automatic aberration-measurement-and-correction system for aberration corrected scanning electron microscope (SEM) was developed. This system measures aberration coefficients from the defocus and astigmatism due to a tilted beam, calculates the corrector voltage corresponding to the measured aberrations, and feeds back the calculated voltage to the aberration-corrector automatically. By implementing this system in an aberration-corrected SEM, it was possible to decrease the total amount of geometrical aberration from 8.1 to 0.84nm after 13 iterations of the correction procedure; consequently the quality of SEM images was improved by this automatic aberration correction.
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