Auger Intensity from Si(001)2×2–Al Surface Excited by Wave-Field in Medium-Energy Electron Diffraction

Abstract

From dynamical analysis of rocking curves from both reflection high-energy electron diffraction (RHEED) and medium-energy electron diffraction (MEED), the surface of Si(001)2×2–Al was confirmed to have a parallel-dimer structure. Furthermore, dynamical calculation, usually used to determine RHEED intensity, was confirmed to also be effective for the calculation of MEED intensity. The incident electron density distribution, or “wave-field”, was calculated for MEED conditions on the basis of the surface structure model. The wave-field at the surface is very sensitive to changes in diffraction conditions, such as the incident glancing angle. The Al(LMM) Auger electron intensity emitted from the Si(001)2×2–Al surface during MEED correlated to the wave-field intensity on the Al atomic rows relatively well.