Abstract
A new primary beam scanning Auger electron energy analyser was constructed. The primary electron energy is variable in the energy range from 1 KeV to 10 KeV. The diameter of the primary beam is about 2 μm at 9 KeV. Using this apparatus, Auger emission microanalysis was carried out on the surface of the various solid matters by selection analysing points in the absorbing current image of the specimen surface. In addition, by synchronizing the scanning of the primary beam on the specimen surface with the flying spot of a CRT, Auger emission micrograph (AEM) was obtained as the brightness modulation due to a particular Auger spectral line emitted from the specimen.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
