Abstract
A new primary beam scanning Auger electron energy analyzer was constructed. The diameter of the primary beam is about 3 μm at 9 keV. Using this apparatus, Auger electron emission microanalysis was carried out on the cleavage surface of a natural graphite single crystal by selecting analyzing points in the sample current image of the specimen surface. In addition, by synchronizing the scanning of the primary beam on the specimen surface with the flying spot of the cathode ray tube, Auger emission micrographs were obtained as the brightness modulation due to a particular Auger spectral line emitted from the specimen. By analyzing the microanalysis spectra, the micrographs, and the sample current images, the chemical composition and the texture of the specimen surface were determined with a spatial resolution of 3 μm.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
