Auger and Secondary Electrons Excited by Backscattered Electrons

Abstract

The contribution of backscattered electrons to the Auger and secondary electron yields was examined by in-situ measurements while evaporating Be onto a Cu substrate at constant rate, 1.2 Å/min. The ratios, βA and βS, of the Auger (KVV) and secondary yields of Be due to backscattered electrons, to those due to primary electrons, were experimentally obtained from the Auger and true secondary electron yields versus backscattering coefficient η curves, and were evaluated to be ∼1.6 and ∼4.4 at a primary energy of 1.0 keV, respectively. The backscattering factor r for Be (KVV Auger) was experimentally found to be ∼1.1 at a primary energy of 1.0 keV.